The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Jun. 23, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Vijay D. Parkhe, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); F25D 19/00 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
F25D 19/006 (2013.01); H01J 37/32724 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01); H01L 21/6833 (2013.01);
Abstract
Embodiments of the present disclosure generally relate to a cryogenic micro-zone connection assembly for a substrate support assembly suitable for use in cryogenic applications. In one or more embodiments, the cryogenic micro-zone connection assembly has a first end having a micro-zone connector. A second end has a socket connection. A flange is disposed between the micro-zone connector and the socket connection. And a wiring harness is coupled at the first end to the micro-zone connector, extends through the flange and is coupled at the second end to the socket connection.