The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2025

Filed:

Aug. 31, 2022
Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Young Jun Son, Cheonan-si, KR;

Byoung Doo Choi, Cheonan-si, KR;

Sung Chul Jung, Cheonan-si, KR;

Woo Sin Jung, Cheonan-si, KR;

Young Un Yun, Asan-si, KR;

Woo Ram Lee, Seoul, KR;

Ki Sang Eum, Cheonan-si, KR;

Assignee:

SEMES CO., LTD., Cheonan-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 43/08 (2006.01); F04B 45/06 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
F04B 43/084 (2013.01); F04B 45/06 (2013.01); H01L 21/67742 (2013.01);
Abstract

Provided is a pump for supplying a liquid. The pump includes: a tube including a pump chamber communicating with a chemical liquid inlet and a chemical liquid outlet, and configured to discharge a chemical liquid through a change in volume due to contraction and expansion; and a driving unit contracting or expanding the tube in a longitudinal direction, in which the tube includes: a flexible tube body including a pump chamber which has an increased internal volume when is contracted in a longitudinal direction and has a decreased internal volume when is expanded in the longitudinal direction, and which has a jar shape of which a radius is increased from the chemical liquid inlet to a center of the pump chamber, and the radius is decreased from the pump chamber to the chemical liquid outlet; a first flange provided at one end of the tube body and including the chemical liquid inlet; and a second flange provided at the other end of the tube body and including the chemical liquid outlet.


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