The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2025

Filed:

Feb. 03, 2021
Applicant:

Horiba Stec, Co., Ltd., Kyoto, JP;

Inventor:

Akihiro Taguchi, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45561 (2013.01); C23C 16/4409 (2013.01); C23C 16/448 (2013.01); C23C 16/52 (2013.01);
Abstract

A vaporization system includes: a vaporization device that is configured to vaporize a liquid material and that includes an inlet port through which the liquid material is introduced and an outlet port through which vaporized gas generated by vaporizing the liquid material is discharged; at least one first fixing screw with which at least one of the inlet port or the outlet port is screwed and fixed onto a base; at least one pipe member that is configured to communicate with the fixed port and through which the vaporized gas or the liquid material flows; and at least one second fixing screw with which the at least one pipe member is screwed and fixed onto the fixed port with a seal member interposed between the at least one pipe member and the fixed port.


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