The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Nov. 07, 2022
Creating Nano Technologies, Inc., Tainan, TW;
CREATING NANO TECHNOLOGIES, INC., Tainan, TW;
Abstract
A high-speed, uniform and high-quality surface treatment apparatus is described. The surface treatment apparatus includes a fixed hollow cylindrical chamber body and a rotatable polygonal prism inside the chamber body. Several flat-substrate holders are symmetrically disposed on the prism surface. The substrate holders revolve as the prism rotates. On the fixed chamber wall, several gas inlet channels, pumping channels and processing units are installed according to the symmetric configuration of the substrate holders. Then, as the substrate holders revolve, the surface treatment processes will occur periodically, including the injection of gas reactants into, the activation of gases in, and the pumping of after-reaction gases out of the processing spaces, defined by the substrate holders and the chamber wall. The substrates will therefore undergo many cycles of periodic surface treatment processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile