The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Oct. 18, 2022
Applicant:
Skyworks Solutions, Inc., Irvine, CA (US);
Inventors:
You Qian, Singapore, SG;
Humberto Campanella-Pineda, Singapore, SG;
Guofeng Chen, Fremont, CA (US);
Rakesh Kumar, Singapore, SG;
Assignee:
Skyworks Solutions, Inc., Irvine, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 30/08 (2023.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 3/00 (2006.01); H04R 7/10 (2006.01); H04R 17/02 (2006.01); H10N 30/30 (2023.01); H10N 30/87 (2023.01);
U.S. Cl.
CPC ...
H10N 30/08 (2023.02); B81B 3/0018 (2013.01); B81C 1/0015 (2013.01); H04R 3/005 (2013.01); H04R 7/10 (2013.01); H04R 17/02 (2013.01); H10N 30/302 (2023.02); H10N 30/306 (2023.02); H10N 30/87 (2023.02); B81B 2201/0257 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/04 (2013.01); B81B 2207/01 (2013.01); H04R 2201/003 (2013.01);
Abstract
A piezoelectric sensor (e.g., for use in a piezoelectric MEMS microphone) includes a substrate and a cantilever beam attached to the substrate. The cantilever beam has a proximal portion attached to the substrate and extending to an unsupported distal end. An electrode is disposed on or in the proximal portion of the beam and has an outer boundary with a shape substantially corresponding to a contour line of a strain distribution plot for the cantilever beam resulting from a force applied to the cantilever beam.