The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Oct. 04, 2022
Applicant:
Skyworks Solutions, Inc., Irvine, CA (US);
Inventors:
Siarhei Dmitrievich Barsukou, Takarazuka, JP;
Hiroyuki Nakamura, Osaka-Fu, JP;
Keiichi Maki, Suita, JP;
Takanori Yasuda, Nara, JP;
Ousmane I Barry, Settsu, JP;
Assignee:
SKYWORKS SOLUTIONS, INC., Irvine, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 7/18 (2006.01); H04R 7/08 (2006.01);
U.S. Cl.
CPC ...
H04R 7/18 (2013.01); H04R 7/08 (2013.01); H04R 2201/003 (2013.01);
Abstract
A piezoelectric microelectromechanical system microphone comprises a support substrate, a membrane including a piezoelectric material attached to the support substrate and configured to deform and generate an electrical potential responsive to impingement of sound waves on the membrane, and a compliant anchor including a trench defined in the support substrate about a portion of a perimeter of the membrane to increase sensitivity of the piezoelectric microelectromechanical system microphone.