The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Mar. 30, 2021
Applicant:
Kyocera Technologies Oy, Espoo, FI;
Inventors:
Assignee:
KYOCERA TECHNOLOGIES OY, Espoo, FI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/2447 (2013.01); H03H 9/02244 (2013.01); H03H 2009/02291 (2013.01); H03H 2009/0244 (2013.01);
Abstract
A silicon microelectromechanical system, MEMS, resonator assembly, includes four flexural beam elements forming a rectangular frame, each beam element being connected at an end thereof to an end of a neighboring one of the beam elements. The resonator assembly further includes connection elements for connecting the rectangular frame to at least one mechanical anchor, and the resonator assembly supporting an in-plane flexural collective resonance mode.