The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 10, 2025

Filed:

Dec. 03, 2020
Applicant:

Rorze Corporation, Hiroshima, JP;

Inventor:

Yoshiyuki Fujishiro, Ibara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6773 (2013.01); H01L 21/67727 (2013.01); H01L 21/67733 (2013.01); H01L 21/67766 (2013.01); H01L 21/681 (2013.01); H01L 21/67769 (2013.01);
Abstract

Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices--are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports--, and transfer FOUPsbetween the load ports--. The FOUP transfer devices--have first optical I/O communication devices--and are configured such that second optical I/O communication devices--provided for the load ports--are connected thereto, and so as to carry out, in place of the load ports--, the optical I/O communication carried out between the load ports--and an OHT cart


Find Patent Forward Citations

Loading…