The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Jun. 10, 2022
Zhejiang Qiushi Semiconductor Equipment Co., Ltd, Hangzhou, CN;
Zhejiang Jingsheng M & E Co., Ltd, Shaoxing, CN;
Liang Zhu, Hangzhou, CN;
Wenjie Shen, Hangzhou, CN;
Jiancan Zhou, Hangzhou, CN;
Jiafeng Cheng, Hangzhou, CN;
Qiucheng Zhang, Hangzhou, CN;
Linjian Fu, Hangzhou, CN;
Jianwei Cao, Hangzhou, CN;
Kui Yang, Hangzhou, CN;
ZHEJIANG QIUSHI SEMICONDUCTOR EQUIPMENT CO., LTD, Hangzhou, CN;
ZHEJIANG JINGSHENG M & E CO., LTD, Shaoxing, CN;
Abstract
An epitaxial growth device is provided, which includes an induction coil and a reaction body, and the induction coil is disposed along a circumferential direction of the reaction body; and the reaction body includes a heating base and a plurality of trays, wherein the heating base includes a plurality of workspaces, the plurality of trays are disposed in the plurality of workspaces, respectively, and each of the plurality of trays is disposed in a corresponding workspace; wherein each of the plurality of trays is configured to support a substrate, and each of the plurality of trays is capable of independently rotating relative to the heating base.