The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 10, 2025

Filed:

Aug. 07, 2023
Applicant:

SK Siltron Co., Ltd., Gumi-si, KR;

Inventor:

Soo Cheon Jang, Gyeongsangbuk-do, KR;

Assignee:

SK SILTRON CO., LTD., Gyeongsangbuk-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/24 (2006.01); B24B 37/27 (2012.01); C23C 16/27 (2006.01); C23C 18/12 (2006.01);
U.S. Cl.
CPC ...
B24B 37/27 (2013.01); C23C 16/24 (2013.01); C23C 16/27 (2013.01); C23C 18/1241 (2013.01);
Abstract

A carrier recycling process designed to recycle carriers discarded after use for a certain period of time. The carrier recycling process includes dipping a carrier to be discarded in an organic solvent to remove a bond and to separate a body and an insert from each other, securing a surface roughness of one side surface of the body from which the insert has been separated, depositing a diamond-like-carbon (DLC) coating layer on the one side surface of the body having the secured surface roughness using a PECVD process, and coupling the insert to a circumference of the body having the DLC coating layer deposited thereon.


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