Neural electrode based on three-dimensional structure of flexible substrate, and manufacturing method therefor

Abstract

One embodiment of the present invention provides a flexible neural electrode having improved adherence to an object by using a three-dimensional structure. A neural electrode based on the three-dimensional structure of a flexible substrate, according to one embodiment of the present invention, comprises: a first polymer layer, which is formed from a polymer material, is flexible, and functions as a base; at least one photoresist part, which is formed on one portion of the surface of the first polymer layer and forms a three-dimensional structure; a second polymer layer which is formed on the photoresist part and the rest of the surface of the first polymer layer, and which comprises protrusion parts caused by the photoresist part; a metal thin film layer formed by patterning a metal thin film on the surface of the second polymer layer and the surface of the protrusion parts; and a third polymer layer which is formed on the surface of the second polymer layer and the metal thin film layer so as to function as a covering, and which comprises measurement holes formed so that one portion of the metal thin film layer formed at the ends of the protrusion parts is exposed to the outside.