The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 03, 2025

Filed:

May. 29, 2020
Applicant:

Purdue Research Foundation, West Lafayette, IN (US);

Inventor:

Chi Hwan Lee, West Lafayette, IN (US);

Assignee:

Purdue Research Foundation, West Lafayette, IN (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B32B 27/06 (2006.01); B32B 37/02 (2006.01); B32B 37/18 (2006.01); B32B 43/00 (2006.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); B32B 27/06 (2013.01); B32B 37/02 (2013.01); B32B 37/182 (2013.01); B32B 43/006 (2013.01); H01L 21/568 (2013.01); B32B 2307/202 (2013.01); B32B 2307/204 (2013.01); B32B 2310/021 (2013.01); B32B 2310/0409 (2013.01); B32B 2310/0445 (2013.01); B32B 2457/08 (2013.01); B32B 2457/10 (2013.01); H01L 2221/6835 (2013.01); H01L 2221/68381 (2013.01);
Abstract

Interfacial delamination processes for physically separating a film structure from a substrate, and processes of fabricating a thin-film electronic device. The processes entail providing the substrate with an electrically-conductive separation layer on a surface of the substrate and optionally providing a pin hole free barrier layer on the electrically-conductive separation layer, forming a film structure on the electrically-conductive separation layer or, if present, the barrier layer, to yield a multilayer structure, and separating the film structure from the substrate by subjecting the multilayer structure to interfacial debonding that comprises contacting at least an interface between the film structure and the electrically-conductive separation layer or, if present, the barrier layer, with water or an electrolyte solution.


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