The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Apr. 01, 2024
Applicants:
Pico & Tera Co., Ltd., Suwon-si, KR;
Bum Je Woo, Seongnam-si, KR;
Inventor:
Bum Je Woo, Seongnam-si, KR;
Assignees:
[object Object];
PICO & TERA CO., LTD., Suwon-si, KR;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); H01L 21/6732 (2013.01); H01L 21/67386 (2013.01);
Abstract
A wafer storage container is connected to an external chamber and has a storage chamber in which wafers received through a front opening are accommodated. The wafer storage container includes a fume removal unit that injects a first gas into the storage chamber and exhausts the first gas, and an outside air blocking unit that injects a second gas from a left side of the front opening and exhausts the second gas from a right side of the front opening.