The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Jan. 19, 2021
Murata Machinery, Ltd., Kyoto, JP;
Tatsuo Tsubaki, Ise, JP;
Murata Machinery, Ltd., Kyoto, JP;
Abstract
A storage shelf includes: a main frame; a plurality of shelf modules each having a base plate detachably provided on the main frame, and a supply nozzle provided on the base plate; a main pipe through which purge gas supplied from a supply source flows, and a first branch provided in the main pipe and branches a flow path from the main pipe, in which the shelf modules are each provided with a mass flow controller configured to adjust the flow rate of the purge gas supplied to the supply nozzle, the first branch is connected to a module pipe via an open/close valve that opens/closes the flow path, and the mass flow controller is connected to the module pipe.