The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Dec. 12, 2022
Applicant:
Massachusetts Institute of Technology, Cambridge, MA (US);
Inventors:
Vladimir Bulovic, Lexington, MA (US);
Ella Wassweiler, Cambridge, MA (US);
Anurag Panda, New Delhi, IN;
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/08 (2006.01); F16K 3/26 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4481 (2013.01); C23C 16/08 (2013.01); F16K 3/26 (2013.01);
Abstract
A flow through valve can satisfy the manufacturing constraints encountered when handling materials at high temperatures and low pressures, for example during semiconductor thin-film manufacturing using techniques such as vapor transport deposition.