The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 27, 2025

Filed:

Jun. 28, 2024
Applicant:

Skyworks Global Pte. Ltd., Singapore, SG;

Inventors:

Jiansong Liu, Irvine, CA (US);

Kwang Jae Shin, Yongin, KR;

Jae Hyung Lee, Seoul, KR;

Benjamin Paul Abbott, Irvine, CA (US);

Chun Sing Lam, San Jose, CA (US);

Assignee:

Skyworks Global Pte. Ltd., Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01);
U.S. Cl.
CPC ...
H03H 9/0211 (2013.01); H03H 3/02 (2013.01); H03H 9/174 (2013.01); H03H 9/564 (2013.01); H03H 2003/023 (2013.01); Y10T 29/42 (2015.01); Y10T 29/4908 (2015.01);
Abstract

Methods related to gradient raised frames in film bulk acoustic resonators. According to certain aspects, a method for fabricating a film bulk acoustic resonator device can include: forming a first metal layer over a substrate; forming a piezoelectric layer; forming a second metal layer, the piezoelectric layer positioned between the first and second metal layers; and forming a gradient raised frame implemented relative to one of the first and second metal layers and configured to improve reflection of lateral mode waves and to reduce conversion of main mode waves into lateral mode waves.


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