The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Mar. 08, 2021
Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;
Jian Liu, Beijing, CN;
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing, CN;
Abstract
The present disclosure discloses a carrier device, a semiconductor apparatus, and a residual charge detection method. The disclosed carrier device is configured to carry a wafer in a semiconductor apparatus. The carrier device includes an electrostatic carrier plate and at least three positioning members, wherein the electrostatic carrier plate includes a carrying surface configured to carry the wafer; the at least three positioning members are arranged around the carrying surface at intervals along a circumferential direction of the carrying surface, each positioning member is provided with a position limiting segment, and the at least three position limiting segments form a position limiting space above the carrying surface. An opening size of the position limiting space increases along a direction away from the carrying surface. The above-mentioned solution can solve the problem that a position deviation of the wafer is relatively large due to incomplete charge removal of the wafer.