The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Feb. 25, 2021
National Institute for Materials Science, Tsukuba, JP;
Akiko Nakamura, Tsukuba, JP;
Yoshiharu Murase, Tsukuba, JP;
Hideaki Nishikawa, Tsukuba, JP;
Taro Yakabe, Tsukuba, JP;
Naoya Miyauchi, Tsukuba, JP;
NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Tsukuba, JP;
Abstract
The device for observing permeation and diffusion path of observation target gas includes: a scanning electron microscope; an observation target ion detecting unit; an observation target gas supply unit; a diaphragm-type sample holder, to which the sample is mounted in attachable/detachable state, as a diaphragm dividing between the analysis chamberand the observation target gas pipe; and a control unit. The control unit acquires a SEM image and at the same time detects the observation target gas, which diffuses within the sample and is discharged to the surface of the sample, by electron stimulated desorption, in a state where stress is applied to the sample due to differential pressure generated between the analysis chamber and the observation target gas pipe by supplying the observation target gas, and obtains an ESD image of the observation target ions.