The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Jun. 02, 2022
Battelle Memorial Institute, Columbus, OH (US);
Thomas F. Kent, Columbus, OH (US);
Jeffrey A. Simon, Columbus, OH (US);
BATTELLE MEMORIAL INSTITUTE, Columbus, OH (US);
Abstract
In an imaging method, a focal point of a focused optical beam is sequentially mechanically positioned at coarse locations in or on an integrated circuit (IC) wafer or chip. At each coarse location, a two-dimensional (2D) image or mapping tile is acquired by steering the focal point to fine locations on or in the IC wafer or chip using electronic beam steering and, with the focal point positioned at each fine location, acquiring an output signal produced in response to an electrical charge that is optically injected into the IC wafer or chip at the fine location by the focused optical beam. The 2D image or mapping tiles are combined, including stitching together overlapping 2D image or mapping tiles, to generate an image or mapping of the IC wafer or chip. The electronic beam steering may be performed using a galvo mirror. The set of coarse locations may span a three-dimensional (3D) volume.