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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12313972 B1

PDFFull Text
Date of Patent:
May. 27, 2025

Filed:

Jul. 20, 2020

Resist underlayer film-forming composition

Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Hiroto Ogata, Toyama, JP;

Hirokazu Nishimaki, Toyama, JP;

Makoto Nakajima, Toyama, JP;

Yuki Mitsutake, Toyama, JP;

Hayato Hattori, Toyama, JP;

Assignee:

NISSAN CHEMICAL CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Jiong-Ping Lu

Int. Cl.
CPC ...
G03F 7/11 (2006.01); C07D 207/404 (2006.01); C08G 61/02 (2006.01); C08G 61/12 (2006.01); C08G 79/04 (2006.01); G03F 7/26 (2006.01); H01L 21/027 (2006.01); H01L 21/033 (2006.01); H01L 21/308 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C07D 207/404 (2013.01); C08G 61/02 (2013.01); C08G 61/12 (2013.01); C08G 79/04 (2013.01); G03F 7/26 (2013.01); H01L 21/0275 (2013.01); H01L 21/0332 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01); H01L 21/31138 (2013.01); H01L 21/31144 (2013.01); C08G 2261/12 (2013.01); C08G 2261/1412 (2013.01); C08G 2261/1422 (2013.01); C08G 2261/143 (2013.01); C08G 2261/312 (2013.01); C08G 2261/3241 (2013.01); C08G 2261/3327 (2013.01); C08L 2203/20 (2013.01);
Abstract

A resist underlayer film forming composition contains a reaction product of an aromatic compound (A) having 6 to 60 carbon atoms and a compound represented by formula (B), and a solvent. (In the formula, X represent an oxygen atom or a nitrogen atom; Y represents a single bond, an oxygen atom or a nitrogen atom; X and Y may combine with each other to form a ring; and each of R, R, Rand Rindependently represents a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, a cyclic alkyl group having 3 to 8 carbon atoms or an aromatic group having 6 to 10 carbon atoms; provided that Ris present only in cases where X is a nitrogen atom, and Ris present only in cases where Y is a nitrogen atom.)

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