The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Apr. 25, 2024
Christos Tsironis, St-Laurent, CA;
Christos Tsironis, Kirkland, CA;
Christos Tsironis, St-Laurent, CA;
Abstract
Planarity adjustment of RF microprobes in a load pull setup on wafer, using a low-profile impedance tuner that is mounted on a 3-axis tuner positioner at an angle matching approximately the angle of the wafer probe, is performed using a wedge-shaped interface block and a gimbal linking the vertical axis of the 3-axis tuner positioner with the tuner body. The gimbal is required when the axis of the slabline is not aligned with the tips of the RF microprobes, in which case the tuner rotates on a planetary trajectory around the rotation axis of the probe tips. The amplitude of the rotation does not exceed ±5° and can be absorbed using flexible RF cables between the tuner and auxiliary equipment.