The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Feb. 25, 2022
Seiko Epson Corporation, Tokyo, JP;
Kohei Yamada, Shiojiri, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
A laser interferometer includes a light source configured to emit first laser light, an optical modulator including a vibrator and configured to modulate, by the vibrator, the first laser light into second laser light having a different frequency, an optical path switching unit disposed in a first optical path through which the first laser light travels and configured to switch a direction of travel of the first laser light between the first optical path and a second optical path different from the first optical path, a reflector including a light-reflecting surface configured to move along the second optical path and reflect the first laser light traveling through the second optical path, and a photoreceptor configured to receive first interference light of the second laser light and third laser light generated by reflection of the first laser light on an object to be measured, and second interference light of the second laser light and fourth laser light generated by reflection of the first laser light on the light-reflecting surface and output a light-receiving signal.