The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Aug. 30, 2022
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Kohei Yamada, Shiojiri, JP;
Nobuhito Hayashi, Chino, JP;
Assignee:
SEIKO EPSON CORPORATION, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01H 9/00 (2006.01); G01B 9/02 (2022.01); G01B 9/02002 (2022.01);
U.S. Cl.
CPC ...
G01H 9/00 (2013.01); G01B 9/02 (2013.01); G01B 9/02002 (2013.01); G01B 9/02045 (2013.01); G01B 9/02083 (2013.01); G01B 2290/70 (2013.01);
Abstract
A laser interferometer includes: a laser light source configured to emit laser light; a light shielding element having an opening through which the laser light passes; an optical modulator configured to modulate the laser light into reference light having a different frequency; and a light receiving element configured to receive object light generated by reflecting the laser light by an object to be measured and the reference light and output a light receiving signal. 0.10≤φ≤10.0, in which φ[mm] is a diameter of the opening.