The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 27, 2025

Filed:

Nov. 23, 2021
Applicant:

Semes Co., Ltd., Chungcheongnam-do, KR;

Inventors:

Chung Woo Lee, Gyeonggi-do, KR;

Sung Youn Jeon, Chungcheongnam-do, KR;

In Kyu Park, Gyeonggi-do, KR;

Yong Seok Jang, Chungcheongnam-do, KR;

Assignee:

SEMES CO., LTD, Chungcheongnam-Do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G06T 7/00 (2017.01); H01L 21/66 (2006.01); H01L 21/677 (2006.01); H04N 23/73 (2023.01); H04N 23/76 (2023.01);
U.S. Cl.
CPC ...
G01B 11/026 (2013.01); G06T 7/0004 (2013.01); H01L 21/67742 (2013.01); H01L 22/12 (2013.01); H01L 22/34 (2013.01); H04N 23/73 (2023.01); H04N 23/76 (2023.01); G06T 2207/10144 (2013.01); G06T 2207/30164 (2013.01);
Abstract

Provided is a gap measuring method capable of accurately measuring a gap between adjacent members. The gap measuring method includes preparing an equipment to be measured including a first member and a second member, obtaining a first image by capturing the equipment to be measured using a photographing module of a first setting while irradiating a laser to the equipment to be measured, wherein the first image includes a first laser line image corresponding to a surface of the first member and a second laser line image corresponding to a surface of the second member, modifying the photographing module from the first setting to a second setting based on a maximum width of the second laser line image in the first image, obtaining a second image by capturing the equipment to be measured using the photographing module of the second setting while irradiating a laser to the equipment to be measured, and calculating a gap between the first member and the second member based on a discontinuous region between the first laser line image and the second laser line image in the second image.


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