The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Mar. 26, 2021
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., N. Kingstown, RI (US);
Inventors:
Eduardo Ramirez Romero, Grapevine, TX (US);
David Bollinger, Grapevine, TX (US);
Assignee:
Fujifilm Electronic Materials U.S.A., Inc., N. Kingstown, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07C 29/76 (2006.01); B01D 15/08 (2006.01); B01D 71/26 (2006.01); B01D 71/36 (2006.01);
U.S. Cl.
CPC ...
C07C 29/76 (2013.01); B01D 15/08 (2013.01); B01D 71/261 (2022.08); B01D 71/262 (2022.08); B01D 71/36 (2013.01); B01D 2257/80 (2013.01); B01D 2311/2512 (2022.08); B01D 2311/2623 (2013.01);
Abstract
The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process.