The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Jul. 06, 2023
Applicant:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Inventors:
Kenji Ishida, Tokyo, JP;
Takeshi Kitamura, Tokyo, JP;
Assignee:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B25B 11/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B25B 11/005 (2013.01); G03F 7/70708 (2013.01);
Abstract
A holding mechanism includes a suction section and a sealing section. The suction section includes a suction area where a substrate is subjected to vacuum suction. The sealing section includes an elastic section having a plurality of sides arranged to surround the suction area and a plurality of corners each formed between adjacent ones of the plurality of sides, and a repulsive-force-suppressing section provided in at least one of the plurality of corners.