The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Jan. 14, 2021
International Business Machines Corporation, Armonk, NY (US);
Technion Research & Development Foundation Limited, Haifa, IL;
Govind Kaigala, Rueschlikon, CH;
Federico Paratore, Zurich, CH;
Moran Bercovici, Haifa, IL;
Daniel Widerker, Haifa, IL;
Robert Dean Lovchik, Schoenenberg, CH;
International Business Machines Corporation, Armonk, NY (US);
Technion Research & Development Foundation Limited, Haifa, IL;
Abstract
Patterning a substrate can be provided. A substrate is covered by an immersion liquid and a microfluidic probe head is positioned in proximity with the surface of the substrate, so as to immerse a processing surface of the probe head in the immersion liquid. Liquid flows are generated between the processing surface of the probe head and the surface of the substrate, via the probe head. The liquid flows generated include an etching flow of an etching liquid (e.g., an acid or solvent) and a processing flow of a processing liquid (e.g., a solution or suspension).