The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Jul. 13, 2022
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Sho Nagatomo, Nagaokakyo, JP;
MURATA MANUFACTURING CO., LTD., Kyoto, JP;
Abstract
An acoustic wave device includes a semiconductor support including a principal surface, a piezoelectric layer on the principal surface of the semiconductor support, and an IDT electrode on a principal surface of the piezoelectric layer. The IDT electrode includes first and second busbars, and first and second electrode fingers. The IDT electrode includes first gaps between the first busbar and respective second electrode fingers. A recess is provided in at least a portion of the semiconductor support substrate overlapping the first gaps as viewed in plan. No recess is provided in at least a portion of the semiconductor support substrate overlapping the IDT electrode as viewed in plan. The recess opens toward the piezoelectric layer.