The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 20, 2025

Filed:

May. 23, 2023
Applicant:

Gudeng Equipment Co., Ltd., New Taipei, TW;

Inventors:

Yin-Feng Chan, New Taipei, TW;

Lin-Hsin Tu, New Taipei, TW;

Ming-Mo Lo, New Taipei, TW;

Assignee:

GUDENG EQUIPMENT CO., LTD., New Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01N 21/94 (2006.01); G03F 1/66 (2012.01);
U.S. Cl.
CPC ...
G03F 7/70741 (2013.01); G01N 21/94 (2013.01); G03F 1/66 (2013.01); G03F 7/70758 (2013.01); G03F 7/7085 (2013.01); G03F 7/70916 (2013.01);
Abstract

An inner pod holding device conducive to reducing dust contamination comprises a separator, a plurality of supporters, a first positioning module, and a second positioning module. The separator defines a concealing space and a holding space. The plurality of supporters is disposed in the holding space. The first positioning module includes a first driving member and at least one first positioning member. The first driving member is disposed in the concealing space and configured to move in a first direction. The second positioning module includes a second driving member and at least one second positioning member. The second driving member is disposed in the concealing space and configured to move in a second direction. The first and second positioning members each have a top portion protruding to the holding space. An optical inspection apparatus with the inner pod holding device is further provided.


Find Patent Forward Citations

Loading…