The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Dec. 27, 2022
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Yun Ho Choi, Osan-si, KR;
Seung Won Kim, Yongin-si, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70733 (2013.01);
Abstract
Disclosed is a photo mask stage unit performing alignment on a photo mask, the photo mask stage unit including: an aligning member for aligning the photo mask so that the photo mask is positioned in a proper position; and guide members for supporting edges of the photo mask and guiding the photo mask to the proper position, in which the aligning member pushes the photo mask in a diagonal direction.