The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 20, 2025

Filed:

Aug. 24, 2020
Applicant:

Beijing Voyager Technology Co., Ltd., Beijing, CN;

Inventors:

Youmin Wang, Mountain View, CA (US);

Yufeng Wang, Mountain View, CA (US);

Gary Li, Mountain View, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01S 17/89 (2020.01); G01S 7/481 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G01S 17/89 (2013.01); G01S 7/4811 (2013.01); G01S 7/4816 (2013.01); G02B 26/101 (2013.01);
Abstract

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module of a vehicle and comprises: a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate, the MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror; and an actuator directly connected to the substrate and mechanically connected to an end portion of the micro-mirror and deformable in response to an electrical signal to generate a torque to rotate the micro-mirror around a rotation axis to reflect light emitted by a light source out of the LiDAR module or to reflect light received by the LiDAR module to a receiver.


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