The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Jan. 12, 2021
Axiomatique Technologies, Inc., Fremont, CA (US);
Trevor A. Norman, Fremont, CA (US);
Robert Mamazza, Palm Harbor, FL (US);
Francisco Xavier Machuca, Oakland, CA (US);
AXIOMATIQUE TECHNOLOGIES, INC., Fremont, CA (US);
Abstract
A defect detection system comprising of an incoherent light source and a collimating light source attachment to produce spatially coherent light waves (e.g., X-rays) that are capable of deeply penetrating a device under test (e.g., a semiconductor). Changes in the spatial coherence of the light waves incident upon the device under test may be utilized to generate one or more electronic maps that indicate one or more physical gauges for length, area, or volume, one or more concentration of elements or distributions in space, and one or more defects within the device under test, such as, cracks, breaks, gaps, and/or air pockets within the device under test.