The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 20, 2025

Filed:

Dec. 30, 2022
Applicant:

Gudeng Equipment Co., Ltd., New Taipei, TW;

Inventors:

Chin-Hung Wen, New Taipei, TW;

Chao-Chin Chin, New Taipei, TW;

Keng-Liang Lin, New Taipei, TW;

An-Pang Wang, New Taipei, TW;

Assignee:

GUDENG EQUIPMENT CO., LTD., New Taipei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 15/061 (2022.01); G03F 7/00 (2006.01); H02J 7/00 (2006.01); H02J 50/10 (2016.01);
U.S. Cl.
CPC ...
G01F 15/061 (2013.01); G03F 7/70741 (2013.01); H02J 7/0047 (2013.01); H02J 50/10 (2016.02);
Abstract

A jig for automatically measuring flow rate of a reticle carrier comprises a jig body, a flow rate detection module, a wireless communication module, a capacitor and a wireless charging receiving module. The jig body has a storage space, at least one gas inlet hole and at least one gas outlet hole communicated to the storage space. The flow rate detection module includes a flowmeter and a flow indicator connected to the flowmeter by a signal, the flowmeter is disposed in the storage space. The wireless communication module is connected to the flowmeter by a signal. The capacitor is electrically connected to the flow rate detection module and the wireless communication module. The wireless charging receiving module is disposed at a bottom of the jig body, and electrically connected to the capacitor.


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