The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Apr. 09, 2024
Applicant:
Milaebo Co., Ltd., Pyeongtaek-si, KR;
Inventors:
Che Hoo Cho, Seoul, KR;
Yeon Ju Lee, Hwaseong-si, KR;
Woo Yeon Won, Pyeongtaek-si, KR;
Ku Kil Jeong, Osan-si, KR;
Assignee:
MILAEBO CO., LTD., Pyeongtaek-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/14 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
F04B 37/14 (2013.01); C23C 16/4405 (2013.01); C23C 16/4412 (2013.01);
Abstract
Provided is a reactive by-products collection system utilizing the narrow sub-factory structure of the existing semiconductor manufacturing facility consisting of a two-story structure of the main factory and sub-factory and providing a replaceable collection device structure that is connected vertically to a vacuum pump via a connecting pipe so that it solves the problem of lack of reactive by-product collection treatment capacity in the system using increased process gas.