The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Mar. 07, 2023
Applicant:
Toto Ltd., Kitakyushu, JP;
Inventors:
Junichi Iwasawa, Fukuoka-ken, JP;
Toshihiro Aoshima, Fukuoka-ken, JP;
Assignee:
Toto Ltd., Fukuoka, JP;
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/505 (2006.01); C04B 35/622 (2006.01); C04B 41/00 (2006.01); C04B 41/50 (2006.01); C04B 41/87 (2006.01); C23C 4/12 (2016.01); C23C 16/44 (2006.01); C23C 24/04 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C04B 41/87 (2013.01); C04B 35/505 (2013.01); C04B 35/62222 (2013.01); C04B 41/009 (2013.01); C04B 41/5045 (2013.01); C23C 4/12 (2013.01); C23C 16/4404 (2013.01); C23C 24/04 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/781 (2013.01); C04B 2235/785 (2013.01); C04B 2235/963 (2013.01); C04B 2237/066 (2013.01); C04B 2237/343 (2013.01); C04B 2237/592 (2013.01); Y02T 50/60 (2013.01);
Abstract
According to an aspect of the invention, there is provided a plasma-resistant member including: a base member; and a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant, the layer structural component including a first uneven structure, and a second uneven structure formed to be superimposed onto the first uneven structure, the second uneven structure having an unevenness finer than an unevenness of the first uneven structure.