Pressure sensor

Abstract

A pressure sensor () includes a pressure measuring device () including: a circuit board (); and a processing unit () and a detection unit, both provided on the circuit board (); the detection unit includes first, second and third MEMS sensing elements (); the first MEMS sensing element () is configured to sense a first pressure (P) at a first target position; the second MEMS sensing element () is configured to sense a second pressure (P) at a second target position, and the third MEMS sensing element () is configured to sense a pressure difference (ΔP) between the first and second target positions; the processing unit () is configured to determine whether the three MEMS sensing elements () are abnormal based on the first and second pressures and on the pressure difference; if it is determined that at least one of the three MEMS sensing elements is abnormal, the processing unit () outputs abnormal diagnostic information; if it is determined that none of the three MEMS sensing elements is abnormal, the processing unit () outputs information about the pressure(s) at the first and/or second target position(s) and the pressure difference; thus rationality diagnosis of the pressure signals is achieved, resulting in increased reliability and accuracy in pressure measurement.