The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Feb. 10, 2023
Canon Kabushiki Kaisha, Tokyo, JP;
Hisashi Namba, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Imprint apparatus includes: a discharge-unit including a nozzle-array that plurality of nozzles are arranged in a nozzle-array-direction, a moving-unit to move relative-positions of a substrate and the discharge-unit, and a discharge-control-unit control to apply a resin to the substrate by applying a resin from a nozzle corresponding to a predetermined-cycle in the nozzle-array-direction in the discharge-unit and by moving the relative-positions by the moving-unit, the imprint apparatus including an identifying-unit to identify a discharging defective-nozzle in the discharge-unit and a complementing-unit to, if the nozzle corresponding to the predetermined-cycle includes a discharging-defective-nozzle, complement the discharging-defective-nozzle with an alternative-nozzle near the discharging-defective-nozzle, wherein the complementing-unit determines a nozzle to be used for discharge so that there is at least one location where a cycle of nozzles applying a resin in the nozzle-array-direction is n−1 if the predetermined-cycle is n, and the resin is applied to another location in the predetermined-cycle n.