The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 13, 2025

Filed:

Jan. 31, 2022
Applicant:

Dynax Semiconductor Inc., Suzhou, CN;

Inventor:

Shufeng Zhao, Suzhou, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/40 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01); H10D 30/01 (2025.01); H10D 30/47 (2025.01); H10D 64/01 (2025.01); H10D 64/23 (2025.01); H10D 64/27 (2025.01); H01L 23/66 (2006.01);
U.S. Cl.
CPC ...
H10D 64/411 (2025.01); H10D 30/015 (2025.01); H10D 30/475 (2025.01); H10D 64/01 (2025.01); H10D 64/258 (2025.01); H01L 23/66 (2013.01);
Abstract

Disclosed are a semiconductor device and a preparation method thereof. The semiconductor device includes a substrate, a multilayer semiconductor layer, a dielectric layer, a source and a drain. A gate trench is formed in the multilayer semiconductor layer and the dielectric layer. A gate is formed in the gate trench, and the gate trench includes a first sub-portion of the gate trench formed in the multilayer semiconductor layer and a second sub-portion of the gate trench penetrating the dielectric layer. The second sub-portion of the gate trench includes a second opening located on the surface of the dielectric layer close to the substrate and a third opening on the surface of the dielectric layer away from the substrate. The vertical projection of the third opening on the substrate covers the vertical projection of the second opening on the substrate.


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