The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Sep. 13, 2022
Applicant:
Skyworks Solutions, Inc., Irvine, CA (US);
Inventors:
Assignee:
SKYWORKS SOLUTIONS, INC., Irvine, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 17/00 (2006.01); H04R 17/02 (2006.01); H04R 31/00 (2006.01); H04B 1/40 (2015.01);
U.S. Cl.
CPC ...
H04R 17/02 (2013.01); H04R 31/00 (2013.01); H04B 1/40 (2013.01); H04R 2201/003 (2013.01);
Abstract
A piezoelectric microelectromechanical systems (MEMS) microphone is provided comprising a substrate including walls defining a cavity and at least two of the walls defining a respective anchor region each, a piezoelectric film layer defining at least two beams, each respective beam supported by the substrate at each anchor region, the beams being free along a portion of their respective lengths and also connected at a connecting region away from the respective anchor regions; and an electrode disposed over the piezoelectric film layer. A method of manufacturing such a MEMS microphone is also provided.