The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 13, 2025

Filed:

Jun. 27, 2022
Applicant:

Analog Devices International Unlimited Company, Limerick, IE;

Inventors:

Padraig Fitzgerald, Mallow, IE;

George Redfield Spalding, Jr., Edinburgh, GB;

Jonathan Ephraim David Hurwitz, Edinburgh, GB;

Michael J. Flynn, Woodhaven, IE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/027 (2006.01); H01L 21/306 (2006.01); H01L 21/8234 (2006.01); H01L 23/528 (2006.01); H01L 27/06 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 21/30604 (2013.01); H01L 21/8234 (2013.01); H01L 23/528 (2013.01); H01L 27/0629 (2013.01); H01L 21/0273 (2013.01);
Abstract

The present disclosure relates to integrated circuits which include various structural elements. In particular, a combination of trenches and cavities are used to mechanically isolate the integrated circuit from the surrounding substrate. The trenches may be formed such that they surround the integrated circuit, and the cavities may be formed under the integrated circuit. As such, the integrated circuit may be formed on a portion of the substrate that forms a platform. In order that the platform does not move, it may be tethered to the surrounding substrate.


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