The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Mar. 17, 2021
Phoenix Electric Co., Ltd., Himeji, JP;
Tomohiko Inoue, Himeji, JP;
Kenichi Yamashita, Himeji, JP;
Hiromu Matsumoto, Himeji, JP;
Tomihiko Ikeda, Himeji, JP;
PHOENIX ELECTRIC CO., LTD., Himeji, JP;
Abstract
A light irradiation device for an exposure apparatus allowing implementation of photo-alignment process with a simple configuration is provided. The light irradiation device is configured using a light source with a plurality of LEDs, and a polarizing element that receives light from the light source and applies the light transmitted through the polarizing element to a workpiece. An optical axis of each of the LEDs is set in such a manner as to have a first angle θto the workpiece. A second angle θas an angle half of a light distribution angle of the light emitted from each of the LEDs is set smaller than the first angle θ