The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Apr. 27, 2020
Tohoku University, Sendai, JP;
TOHOKU UNIVERSITY, Miyagi, JP;
Abstract
A scanning mirror that prevents the oxidation or hydroxylation of a torsion bar, thereby suppressing deterioration of the torsion bar and a manufacturing method for the scanning mirror. The scanning mirror has a torsion bar provided so as to support a mirror portion and of which the surface is covered with an atomic layer deposition (ALD) layer. The scanning mirror is configured such that the mirror portion can be rotated around an axis that extends along the torsion bar when torsional force is applied to the torsion bar. The scanning mirror is manufactured by forming the mirror portion and the torsion bar and then forming the ALD layer on at least the surface of the torsion bar.