The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 13, 2025

Filed:

Sep. 29, 2022
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Aihiko Numata, Tokyo, JP;

Takahiro Sato, Kanagawa, JP;

Tatsuhito Goden, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/3581 (2014.01); G01V 8/20 (2006.01); G06V 10/141 (2022.01); G06V 10/145 (2022.01); H04N 5/265 (2006.01); H04N 23/56 (2023.01);
U.S. Cl.
CPC ...
G01V 8/20 (2013.01); G06V 10/141 (2022.01); G06V 10/145 (2022.01); H04N 5/265 (2013.01); H04N 23/56 (2023.01); G06V 2201/05 (2022.01);
Abstract

In an inspection system that uses terahertz waves, in order to improve the inspection precision for objects and the like, the inspection system has an illumination unit having a plurality of illumination elements that radiate terahertz waves; a camera unit that captures images of the terahertz waves that have been reflected off of an object that has been irradiated by the plurality of illumination elements; and a control unit that performs control so as to make the light emission timings for the plurality of illumination elements different.


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