The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Sep. 06, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Andrew Michael Yednak, Iii, Phoenix, AZ (US);
Todd Robert Dunn, Cave Creek, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); C30B 25/14 (2006.01); C30B 25/16 (2006.01); G01F 23/00 (2022.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/4408 (2013.01); C23C 16/45525 (2013.01); C23C 16/4583 (2013.01); C30B 25/14 (2013.01); C30B 25/165 (2013.01); G01F 23/0007 (2013.01);
Abstract
A chemical vessel is disclosed comprising a dip tube and a level sensor tube arranged in an elongated counterbore incorporated into a housing of the chemical vessel. The chemical vessel may be configured to allow a pushback routine to take place, whereby a level of liquid in the chemical vessel is reduced to a point that the dip tube is free from liquid inside the dip tube or at the bottom of the dip tube. Once the dip tube is free of the liquid, then a vacuum source may be used to purge vapor within the chemical vessel without the risk of damage to the vacuum source.