The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Nov. 16, 2020
Basf SE, Ludwigshafen am Rhein, DE;
Wayne State University, Detroit, MI (US);
Sinja Verena Klenk, Ludwigshafen am Rhein, DE;
Alexander Georg Hufnagel, Ludwigshafen am Rhein, DE;
Hagen Wilmer, Ludwigshafen am Rhein, DE;
Daniel Löffler, Ludwigshafen am Rhein, DE;
Sabine Weiguny, Ludwigshafen am Rhein, DE;
Kerstin Schierle-Arndt, Ludwigshafen am Rhein, DE;
Charles Hartger Winter, Detroit, MI (US);
Nilanka Weerathunga Sirikkathuge, Detroit, MI (US);
BASF SE, Ludwigshafen am Rhein, DE;
Wayne State University, Detroit, MI (US);
Abstract
The present invention is in the field of processes for preparing inorganic metal- or semimetal-containing films. The process for preparing inorganic metal- or semimetal-containing films comprising (a) depositing a metal- or semimetal-containing compound from the gaseous state onto a solid substrate and (b) bringing the solid substrate with the deposited metal- or semimetal-containing compound in contact with a compound of general formula (I) or (II) wherein Z is NR, PR, OR, SR, CR, SiR, X is H, R' or NR′, wherein at least one X is H, n is 1 or 2, and R and R′ is an alkyl group, an alkenyl group, an aryl group, or a silyl group.