The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Jul. 06, 2023
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Hyosung Kim, Hwaseong-si, KR;
JinYoung Choi, Suwon-si, KR;
Sungmin Hur, Yongin-si, KR;
Nari Ahn, Seongnam-si, KR;
Hyeongsuk Yoo, Asan-si, KR;
Dongwon Han, Seoul, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/04 (2006.01); C22C 38/08 (2006.01); H10K 50/844 (2023.01); H10K 59/12 (2023.01); H10K 71/00 (2023.01); H10K 71/10 (2023.01);
U.S. Cl.
CPC ...
C23C 16/042 (2013.01); C22C 38/08 (2013.01); H10K 50/844 (2023.02); H10K 59/12 (2023.02); H10K 71/00 (2023.02); H10K 71/10 (2023.02); H10K 59/1201 (2023.02);
Abstract
A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.