The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
Jan. 13, 2020
Applicant:
Coherent, Inc., Santa Clara, CA (US);
Inventors:
Assignee:
Coherent, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/109 (2005.12); B23K 26/00 (2013.12); B23K 26/0622 (2013.12); B23K 26/064 (2013.12); B23K 26/354 (2013.12); H01S 3/06 (2005.12); H01S 3/08 (2022.12); H01S 3/094 (2005.12); H01S 3/0941 (2005.12); H01S 3/115 (2005.12); H01S 3/16 (2005.12); H01S 3/00 (2005.12);
U.S. Cl.
CPC ...
H01S 3/109 (2012.12); B23K 26/0006 (2012.12); B23K 26/0622 (2015.09); B23K 26/064 (2015.09); B23K 26/354 (2015.09); H01S 3/0606 (2012.12); H01S 3/08054 (2012.12); H01S 3/094076 (2012.12); H01S 3/0941 (2012.12); H01S 3/115 (2012.12); H01S 3/1611 (2012.12); H01S 3/1643 (2012.12); H01S 3/0092 (2012.12);
Abstract
Laser annealing apparatus includes a plurality of frequency-tripled solid-state lasers, each delivering an output beam of radiation at a wavelength between 340 nm and 360 nm. Each output beam has a beam-quality factor (M) greater of than 50 in one transverse axis and greater than 20 in another transverse axis. The output beams are combined and formed into a line-beam that is projected on a substrate being annealed. Each output beam contributes to the length of the line-beam.