The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
Jul. 11, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Muhannad Mustafa, Milpitas, CA (US);
Muhammad M. Rasheed, San Jose, CA (US);
Yu Lei, Belmont, CA (US);
Avgerinos V. Gelatos, Scotts Valley, CA (US);
Vikash Banthia, Los Altos, CA (US);
Victor H Calderon, Sunnyvale, CA (US);
Shi Wei Toh, Sunnyvale, CA (US);
Yung-Hsin Lee, San Jose, CA (US);
Anindita Sen, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and apparatus for processing substrates are provided herein. In some embodiments, a process kit for a substrate support includes: an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar and the lower surface includes a stepped lower surface to define a radially outermost portion and a radially innermost portion of the upper edge ring.