The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2025

Filed:

Nov. 30, 2023
Applicants:

Wuhan Tianma Micro-electronics Co., Ltd., Wuhan, CN;

Wuhan Tianma Micro-electronics Co., Ltd. Shanghai Branch, Shanghai, CN;

Inventors:

Naichao Mu, Wuhan, CN;

Yuan Li, Wuhan, CN;

Yu Xin, Wuhan, CN;

Jun Ma, Wuhan, CN;

Lijing Han, Wuhan, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2005.12); C23C 14/12 (2005.12);
U.S. Cl.
CPC ...
C23C 14/042 (2012.12); C23C 14/12 (2012.12);
Abstract

A mask module includes a framework, a first strip plate fixed on the framework and extending along a first direction, and a first mask. The first mask is located on a side, deviating from the framework, of the first strip plate. The first mask includes at least one preset area, and the preset area includes at least one opening area. The first strip plate is provided with a first concave-convex structure on one side edge along the first direction. At least one convex structure is provided in a middle of the first concave-convex structure along the first direction. In a direction perpendicular to a surface of the first mask, the first concave-convex structure and the convex structure cover at least a part of area of the at least one opening of the preset area. The convex structure and the first strip plate are integrally formed.


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