Curved quasi-non-diffracting laser beams for laser processing of transparent workpieces

Abstract

A method for processing a transparent workpiece comprises directing a laser beam oriented along a beam path into the transparent workpiece such that a portion of the laser beam directed into the transparent workpiece is a laser beam focal arc and generates an induced absorption within the transparent workpiece, the induced absorption producing a defect within the transparent workpiece. The laser beam focal arc has a wavelength λ, a spot size w, and a Rayleigh range Zthat is greater than where Fis a dimensionless divergence factor having a value of 10 or greater. The laser beam focal arc varies in a line shift direction relative to an unaffected beam propagation direction, where the line shift direction extends in an x-direction, a y-direction, or both along a length of the laser beam focal arc, such that the defect varies in the line shift direction.